STYLUS PROFILOMETERKLA TENCOR P6

STYLUS PROFILOMETER KLA TENCOR P6:

• Lateral scan lenght: 60 mm, motorized stages: X, Y, rotational, levelling, speed range: 25 µm/s to 25 mm/s
• MicroHead XR5 Extended measurement Head: 2x Optic vision (vertical, lateral), Vertical range: 0-1000µm, Stylus force range: 0.5-50 mg, Resolution: repeatability: 6 Å, reproducibility: 15 Å
• Basic stylus: 2.0 µm radius Extra stylus HAR (High Aspect Ratio): 45° angle
• Anti-vibration table
  Apex 3D Elaboration Software

Contact Person/Responsibles: Prof. Alberto Rota

Ownership: UNIMORE, Department of Physics, Informatics and Mathematics

Funding Agency: Regione Emilia Romagna, UE