PVD magnetron sputtering 5Pascal:

  • Target materials: C, Cr, Cu, Ti, Si, Zn, MoS2, Zr, Ca, Mg, Mn, Ni, others on request
  • Sputter coating of a wide range of substrate materials like metals, ceramics and polymers
  • On 1200W DC and one 300W RF power supplies, 4 inch targets

Contact Person/Responsibles: Dott. A Ballestrazzi

Ownership: UNIMORE, Department of Physics, Informatics and Mathematics

Ongoing/Active Collaborations:

  • Prof. G. Cantarella (Unimore-FIM)
  • Prof. A. Rota (Unimore-FIM)
  • Prof. L. Lusvarghi (Unimore-DIEF)
  • Dott. G. Paolicelli (CNR Nano)