Dual Beam FIB-SEM – FEI Strata DB235M:

  • Gallium Focused Ion Beam (FIB) and Field-Emission Scanning Electron Microscope (SEM) on a single platform.
  • Best resolution of 8 nm (FIB) and 2 nm (SEM).
  • Other equipment installed: Gas Injection System (GIS) for ion and electron-beam deposition; Energy Dispersive X-Ray (EDX) microanalysis; Nanomanipulators for in-situ testing and preparations.

Contact Person/Responsibles: Dr. Gian Carlo Gazzadi

Ownership: CNR

Funding Agency: Fondazione Cassa di Risparmio di Modena

Ongoing/Active Collaborations:

  • The instrument works as a facility for CNR-NANO and FIM

University Strategic Lines:

  • Part of NANOFAB Lab, CNR-NANO